Oxford Instruments Partners with NYU Nanofab to Pioneer Atomic-Scale Quantum Advancements with PlasmaPro ASP

The NYU Nanofabrication Cleanroom has enhanced its quantum fabrication capabilities by installing an Oxford Instruments PlasmaPro ASP atomic layer deposition (ALD) system, becoming the first in the United States to utilize this technology for superconducting quantum applications.

“As an academic prototyping facility within the NORDTECH Hub, NYU Nanofab’s role is to enable new materials and processes that bridge fundamental research and scalable manufacturing for quantum technologies,” said Davood Shahrjerdi, Director of the NYU Nanofab. “Extending this flagship capability to next-generation quantum hardware is a natural progression, as it could enable new materials and device architectures. We are excited about establishing this capability in our Nanofab and are grateful to Oxford Instruments for partnering with us to bring this vision to fruition.”